Medium plasma cleaning machine is mainly used in LCD, connectors before mass production areas, such as bonding. ????? Features: All and core components imported to ensure the stability and service life of the machine. ????? Rotary vane vacuum pumps imported, is applicable to other systems using plasma technology environment can work long hours, and in anti-oxidation, corrosion, and many have accumulated rich experience, greatly improved the life of the pump, and improve the protection measures effectively reduce the maintenance costs of the pump, pump, improved working long hours limit, pump oil for high temperature, anti-oxidation oil pump has a high temperature and relieve itself of the cooling system, no water cooling. Pump body is placed inside the cabinet, the machine is compact, small footprint. ????? Control: automatic control system adopts PLC and touch screen control of all process parameters, process real-time monitoring and display operating status, alarm recording and recording technology curve, working time records for maintenance, can provide process information. ??????? ◎ can store 50 groups of formula, random calls. ????? ◎ cleaning time, the clean pressure, RF power, process gas flow rate, set adjustable. ????? ◎ process parameters is password protected, password management hierarchical queries. ????? ◎ a button to complete the process fully automated, real-time fault alarm, illegal operation tips, cleaning tips and other end. ????? ◎ automatic reminder system maintenance, replacement of vacuum pump oil, to avoid overloading the machine, case work over aging and prolong life. ????? ◎ gas mass flow meter used by the US imports from the analog input and output, range is 0 ~ 200sccm can be adjusted within the range, depending on the specific process requirements of the mass flowmeter available PLC can be achieved PID regulator control vacuum. ????? ◎ according to the special requirements of the process can be used dry pumps, exhaust gas treatment equipment, oil filter, oil filter back devices. Electrode structure (patented) higher ion flux can be well designed to improve plasma uniformity and stability.